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Sapphire Wafer

Sapphire Wafer

Features of crystal sapphire wafer: High working temperature Good thermal conductivity Superior mechanical properties  High anti corrosion Stable dielectric constant & low dielectric loss Excellent light transmission
Item Description

Sapphire Wafer Feature          Sapphire Wafer Application

High working temperature                                 Blue LED substrate

Good thermal conductivity                               Superconductor substrate

Superior mechanical properties                          Electronic and Optoelectronic

High anti corrosion                                           UV and IR Optics

Stable dielectric constant & low dielectric loss

Excellent light transmission

4"Sapphire Wafers for LED Applications

Item

Specifications

Crystal

LED Grade Sapphire

Sapphire purity

99.996%

Orientation

C-Plane(0001) Off angle toward M-Axis0.2± 0.1°

 

C-Plane(0001)Off angle toward A-Axis0± 0.1°

Wafer Diamter

100± 0.1mm

Thickness

650±25um

Primary Flat

A-Plane(11-20)±0.25°

Flat Length

30±1mm

Front Side Surface Roughness

0.3nm

Back Side Surface Roughness

0.8~1.2um

TTV

10 um

LTV

2.0 (5mm*5mm)

TIR(Flatness)

3um

BOW

-10Bow10

Bubble & Color

None by visual inspection in intensive light

Ground Boundary

None by visual inspection in fluorescent light

Color

Transparent

Cleanliness

Epi-Ready

Package

Vacuum packed, in Class 100 clean romm, under a nitrogen atmosphere

 

 2"Sapphire Wafers for LED Applications

Item

Specifications

Crystal 

LED Grade Sapphire

Sapphire purity

99.996%

Orientation

C-Plane(0001) Off angle toward M-Axis0.2± 0.1°

 

C-Plane(0001)Off angle toward A-Axis0± 0.1°

Wafer Diamter

50.8± 0.1mm

Thickness

430±25um

Primary Flat

A-Plane(11-20)±0.20°

Flat Length

16±1mm

Front Side Surface Roughness

0.2nm

Back Side Surface Roughness

0.8~1.2um

TTV

≤10 um

LTV

2.0 (3um*3um)

TIR(Flatness)

3um

BOW

-10Bow10

Bubble & Color

None by visual inspection in intensive light

Ground Boundary

None by visual inspection in fluorescent light

Color

Transparent

Cleanliness

Epi-Ready

Package

Vacuum packed, in Class 100 clean romm, under a nitrogen atmosphere

 

2"PSS Sapphire Substrate Wafer

Item

Specifications

Crystal 

2-3 Grade Monocrystalline  Sapphire

Sapphire purity

99.995%

Orientation

C-axis(0001) offset to M(1-100) 0.2°±0.1°,

 

C-axis(0001) offset to M(1-100) 0.0°±0.1° to A (1 1-2 0)

Wafer Diamter

50.8± 0.1mm

Thickness

430±10um

Primary Flat

A-Plane(11-20)±0.25°

Flat Length

16.0±1.0mm

Front Side Surface Roughness

Pattern Feature: hexagonal, 3.00±0.25um diameter x 1.5±0.25um depth; spacing 2-3um; Epi-ready polished, Ra< 0.2nm

Back Side Surface Roughness

SSP: Fine ground, Ra 0.4 to 1.0um; DSP: Polished

Flatness

TTV < 10um, BOW < 10um, Warp < 10um

Ground Boundary

None by visual inspection in fluorescent light

Bubble & Color

None by visual inspection in intensive light

Ground Boundary

None by visual inspection in fluorescent light

Color

Transparent

Cleanliness

Free visible contamination

Package

Packaged in a class 100 clean room environment, in cassette of 25pcs or single fluroware, under a nitrogen atmosphere.

 


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