6H SiC Wafer

6H SiC Wafer

PAM-XIAMEN can offer 6H SiC wafer with n type or semi-insulating, here we make a brief introduction in two parts:

1.Difference Between 6H and 4H polytype:
1)Commercial resistivity of 6H n type SiC Wafer is (0.02~0.1)ohm.cm, while 4H one is (0.015~0.028)ohm.cm.
2)Stacking sequence of 6H SiC substrate is ABCACB, while 4H one is ABCB
3)Thermal conductivity of 6H semi-insulating SiC wafer is a~460W/mK and c~320W/mk, while 4H one is a~490W/mK and c~390W/mK. For n type SiC, its thermal conductivity, take 4H one as an example, a~420W/mK and c~370W/mK, which is much lower than semi-insulating one, what is why end user choose Semi-insulating SiC as heat sink or other conductivity material.
4)Bank GaP of 6H one is 3.02eV while 4H one is 3.23eV.
5)Hole Mobility of 6H SiC Wafer is 90cm2/V.s while 4H one is~115cm2/V.s
6)Electron mobility of 6H Substrate is ~400cm2/V.s while 4H one is ~800cm2/V.s

2.Specifiaction of 2” 6H SiC Wafer:

SUBSTRATE PROPERTY S6H-51-N-PWAM-250      S6H-51-N-PWAM-330                  S6H-51-N-PWAM-430
Description A/B Production Grade  C/D Research Grade  D Dummy Grade             6H SiC Substrate
Polytype 6H
Diameter (50.8 ± 0.38) mm
Thickness (250 ± 25) μm                  (330 ± 25) μm                  (430 ± 25) μm
Carrier Type n-type or semi-insulating
Dopant Nitrogen or V doped
Resistivity (RT) N type: (0.02 ~ 0.1) Ω·cm; Semi-insulating:>=1E5 ohm.cm
Surface Roughness < 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
FWHM A<30 arcsec                   B/C/D <50 arcsec
Micropipe Density(MPD) A+≤1cm-2  A≤10cm-2   B≤30cm-2  C≤50cm-2  D≤100cm-2
Surface Orientation
On axis <0001>± 0.5°
Primary flat orientation Parallel {1-100} ± 5°
Primary flat length 16.00 ± 1.70 mm
Secondary flat orientation Si-face:90° cw. from orientation flat ± 5°
C-face:90° ccw. from orientation flat ± 5°
Secondary flat length 8.00 ± 1.70 mm
Surface Finish Single or double face polished
Packaging Single wafer box or multi wafer box
Usable area ≥ 90 %


For more information, please visit: https://www.powerwaywafer.com/sic-wafer/sic-wafer-substrate.html or send us at victorchan@powerwaywafer.com

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