6H SiC Wafer
PAM-XIAMEN can offer 6H SiC wafer with n type or semi-insulating, here we make a brief introduction in two parts:
1.Difference Between 6H and 4H polytype:
1)Commercial resistivity of 6H n type SiC Wafer is (0.02~0.1)ohm.cm, while 4H one is (0.015~0.028)ohm.cm.
2)Stacking sequence of 6H SiC substrate is ABCACB, while 4H one is ABCB
3)Thermal conductivity of 6H semi-insulating SiC wafer is a~460W/mK and c~320W/mk, while 4H one is a~490W/mK and c~390W/mK. For n type SiC, its thermal conductivity, take 4H one as an example, a~420W/mK and c~370W/mK, which is much lower than semi-insulating one, what is why end user choose Semi-insulating SiC as heat sink or other conductivity material.
4)Bank GaP of 6H one is 3.02eV while 4H one is 3.23eV.
5)Hole Mobility of 6H SiC Wafer is 90cm2/V.s while 4H one is~115cm2/V.s
6)Electron mobility of 6H Substrate is ~400cm2/V.s while 4H one is ~800cm2/V.s
2.Specifiaction of 2” 6H SiC Wafer:
| 2” 6H SIC WAFER SPECIFICATION | |
| SUBSTRATE PROPERTY | S6H-51-N-PWAM-250 S6H-51-N-PWAM-330 S6H-51-N-PWAM-430 |
| Description | A/B Production Grade C/D Research Grade D Dummy Grade 6H SiC Substrate |
| Polytype | 6H |
| Diameter | (50.8 ± 0.38) mm |
| Thickness | (250 ± 25) μm (330 ± 25) μm (430 ± 25) μm |
| Carrier Type | n-type or semi-insulating |
| Dopant | Nitrogen or V doped |
| Resistivity (RT) | N type: (0.02 ~ 0.1) Ω·cm; Semi-insulating:>=1E5 ohm.cm |
| Surface Roughness | < 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish) |
| FWHM | A<30 arcsec B/C/D <50 arcsec |
| Micropipe Density(MPD) | A+≤1cm-2 A≤10cm-2 B≤30cm-2 C≤50cm-2 D≤100cm-2 |
| Surface Orientation | |
| On axis | <0001>± 0.5° |
| Primary flat orientation | Parallel {1-100} ± 5° |
| Primary flat length | 16.00 ± 1.70 mm |
| Secondary flat orientation | Si-face:90° cw. from orientation flat ± 5° |
| C-face:90° ccw. from orientation flat ± 5° | |
| Secondary flat length | 8.00 ± 1.70 mm |
| Surface Finish | Single or double face polished |
| Packaging | Single wafer box or multi wafer box |
| Usable area | ≥ 90 % |
For more information, please visit: https://www.powerwaywafer.com/sic-wafer/sic-wafer-substrate.html
or send us at victorchan@powerwaywafer.com