C-Plane Sapphire Substrate

C-Plane Sapphire Substrate

C-Plane Sapphire Substrate

AM-XIAMEN offers C-Plane Sapphire Substrate, single side polished or double side polished, please see below spec:

2” C-plane SSP Sapphire Substrate:

No Item Specification
1 Material High PurityAl2O3
2 Diameter 50.8+0.1mm
3 Thickness 430土15um
4 TTV ≤10μm
5 LTV ≤1.5μm
6 Bow -10~0μm
7 Warp ≤10μm
8 Primary Flat Length 16.0土1.0mm
9 Front Surface Roughness(Ra)| Ra≤0.2nm
  Back Surface Roughness(Ra) 0.7~1.2μm
11 Primary Flat Orientation A-plane土0.2°
12 Surface Orientation C-Plane(0001)
off Angle 0.2o+0.1″(M-axis);0°+0.1″(A-axis)
13 Laser Mark back side or frontside
14 Package 25pcs/Cassette, Vacuum-sealed, Nitrogen-
filled, Class-100 Cleanroom

Remark: C-plane 0/ 0.1/0.3/ 0.5 deg. to the M plane, +/-0.1 deg. to the A-plane are all available.

 

3” C-plane SSP Sapphire Substrate: PAM200221-SAPPHIRE

No Item specification
1 Material High Purity Al2O3
2 Diameter 76.2土0.4mm
3 Surface Orientation C-Plane(0001)
off Angle0.2°+0.1*(M-axis);0*+0.1*(A-axis)
4 Primany Flat Orientation A-plane土0.5°
5 Primary Flat Length 220土1.0mm
6 Thickness 500土25μm
7 TTV ≤10μm
8 Bow -10~0um
9 warp ≤15μm
10 Front Surface Roughness(Ra) Ra≤0.3nm
11 Back Surface Roughness(Ra) 0.7~1.2um
12 Laser Mark Back or Front Side (BacksidePreferred)
13 Package 25pcs/Cassette, Vacuum-sealed, Nitrogen-
filled, Class100 Cleanroom

 

4” C-plane DSP Sapphire Substrate:PAM20-02-SAPPHIRE

No Item Specification
1 Material High Purity Al2O3
2 Diameter 100.0土0.2mm
3 Thickness 650土20μm
4 Surface Onientation C-Plane(0001)
off Angle0.2*+0.1*(M-axis);O*tO.1″(A-axis)
5 Primary Flat Orientation A-plane士0.2°
6 Primary Flat Length 30.0土1.0mm
7 TTV ≤10um
8 LTV ≤1.5μm(5mm*5mm)
9 Bow -15~0μm
10 Warp ≤30μm
11 Front Surface Roughness(Ra) Ra≤0.3nm
12 Back Surface Roughness(Ra) Ra≤0.3nm
14 LaserMark Back or Front Side(Backside Preferred)
15 Package 25pcs/Cassette,Vacuum-sealed,Nitrogen-
|illed,Class-100 Cleanroom

 

C-Plane Sapphire Substrate

C-Plane Sapphire Substrate

 

 

 

 

 

 

 

 

 

 

For more information, please contact us email at victorchan@powerwaywafer.com and powerwaymaterial@gmail.com

2020-05-20

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