C-Plane Sapphire Substrate
AM-XIAMEN offers C-Plane Sapphire Substrate, single side polished or double side polished, please see below spec:
2” C-plane SSP Sapphire Substrate:
No | Item | Specification |
1 | Material | High PurityAl2O3 |
2 | Diameter | 50.8+0.1mm |
3 | Thickness | 430土15um |
4 | TTV | ≤10μm |
5 | LTV | ≤1.5μm |
6 | Bow | -10~0μm |
7 | Warp | ≤10μm |
8 | Primary Flat Length | 16.0土1.0mm |
9 | Front Surface Roughness(Ra)| | Ra≤0.2nm |
Back Surface Roughness(Ra) | 0.7~1.2μm | |
11 | Primary Flat Orientation | A-plane土0.2° |
12 | Surface Orientation | C-Plane(0001) off Angle 0.2o+0.1″(M-axis);0°+0.1″(A-axis) |
13 | Laser Mark | back side or frontside |
14 | Package | 25pcs/Cassette, Vacuum-sealed, Nitrogen- filled, Class-100 Cleanroom |
Remark: C-plane 0/ 0.1/0.3/ 0.5 deg. to the M plane, +/-0.1 deg. to the A-plane are all available.
3” C-plane SSP Sapphire Substrate: PAM200221-SAPPHIRE
No | Item | specification |
1 | Material | High Purity Al2O3 |
2 | Diameter | 76.2土0.4mm |
3 | Surface Orientation | C-Plane(0001) off Angle0.2°+0.1*(M-axis);0*+0.1*(A-axis) |
4 | Primany Flat Orientation | A-plane土0.5° |
5 | Primary Flat Length | 220土1.0mm |
6 | Thickness | 500土25μm |
7 | TTV | ≤10μm |
8 | Bow | -10~0um |
9 | warp | ≤15μm |
10 | Front Surface Roughness(Ra) | Ra≤0.3nm |
11 | Back Surface Roughness(Ra) | 0.7~1.2um |
12 | Laser Mark | Back or Front Side (BacksidePreferred) |
13 | Package | 25pcs/Cassette, Vacuum-sealed, Nitrogen- filled, Class100 Cleanroom |
4” C-plane DSP Sapphire Substrate:PAM20-02-SAPPHIRE
No | Item | Specification |
1 | Material | High Purity Al2O3 |
2 | Diameter | 100.0土0.2mm |
3 | Thickness | 650土20μm |
4 | Surface Onientation | C-Plane(0001) off Angle0.2*+0.1*(M-axis);O*tO.1″(A-axis) |
5 | Primary Flat Orientation | A-plane士0.2° |
6 | Primary Flat Length | 30.0土1.0mm |
7 | TTV | ≤10um |
8 | LTV | ≤1.5μm(5mm*5mm) |
9 | Bow | -15~0μm |
10 | Warp | ≤30μm |
11 | Front Surface Roughness(Ra) | Ra≤0.3nm |
12 | Back Surface Roughness(Ra) | Ra≤0.3nm |
14 | LaserMark | Back or Front Side(Backside Preferred) |
15 | Package | 25pcs/Cassette,Vacuum-sealed,Nitrogen- |illed,Class-100 Cleanroom |

C-Plane Sapphire Substrate
For more information, please contact us email at victorchan@powerwaywafer.com and powerwaymaterial@gmail.com