12 "Test Grade Silicon Wafer

PAM-XIAMEN offers 300mm bare silicon wafers (12 inch) dummy, test grade, n type or p type. Compared to other silicon wafer suppliers, Powerway Wafer offers professional service with competitive prices.

  • Beschreibung

Produktbeschreibung

PAM-XIAMEN offers 300mm P type or N type test silicon wafer (12 inch). The silicon test wafer thickness is 775±25μm. Compared to other silicon wafer suppliers, Powerway Wafer offers professional service with competitive prices.

1. Specification of Test Silicon Wafer

Parameter Wert
Art des Barrens Nach der Czochralski-Methode gezüchtet
Durchmesser, mm 300 ± 0,2
Dotierstoff B (Bor)
Leitfähigkeitstyp P
Oxigen max, OLD-PPMA 40
Kohlenstoff, PPMA 1
Test silicon wafer crystal orientation <100>
Abweichung von der vorgegebenen Oberflächenorientierung der Kristallebene, Grad 1
Volumenwiderstand Ohm · cm 10-40
Primäre Kerbe Ja
Notch Location 110
Kerbgröße, mm 2,3
Kerbform V
Waferdicke, Mikrometer 775 ± 25
Art der Kennzeichnung Laser
Silicon Laser Marking Location Rückseite
Kantenprofil durch SEMI T / 4
Kratzer auf der Vorderseite abwesend
Polieren der Vorderseite ja
Rückseite polieren ja
Gesamtänderung der Waferdicke (TTV), Mikrometer 5
Durchbiegung (WARP), Mikrometer 60
Die Anzahl der Partikel auf einer Oberfläche größer als 0,09 Mikrometer 50
Oberflächengehalt von Aluminium, E10AT / CM2 1

 

Verpackungsanforderungen:

Parameter  
Art der Verpackung MW300GT-A
Innenbehältermaterial Polyethylen
Äußeres Verpackungsmaterial Aluminium
Stückzahl in einer Packung 25
Wiederverwendbarkeit ja

 

2. Test Silicon Wafer Usage

Silicon wafers larger than 150mm are classified into Mechanical(dummy) Test Wafers and Process Test Wafers, and the test silicon wafer industry standards are in the following SEMI Standards(Semiconductor Equipment and Materials International, a global semiconductor association offered equipment, materials and service for manufacture of the worldwide semiconductor, photovoltaic (PV), LED, MEMS and flat panel display (FPD),and micro or nano-technologies).

3. About Silicon Wafer Test Grade

However, different application has required different parameters for mechanical or process test wafer:

Siliziumwafer mit Prozesstestqualität

Process Silicon Wafer Test Grade, is called Monitor wafer, which is for process monitoring and some processing applications in wafer fabrication. Wafer fab also use monitor test wafers to assess equipment cleanliness, support particle measurement or evaluate metallic contamination etc

Dummy Silicon Wafer

Dummy Silicon Wafer, also called Mechanical grade test wafer, is to test equipment for wafer dimensional and structural characteristics only, which is used to do equipment automation handling tests, reliability marathons, and software tests, and assess interoperability performance of wafer handling hardware.

Also silicon wafer fab use mechanical grade silicon test wafers to process development applications that are not sensitive for particle and defects.

Test Particle Grade Silicon Wafers

Test Particle Grade Silicon Wafers is for particle test monitors to measure wafer particle for applications, like CVD and ALD process.

According to SEMI standard, Particle of silicon wafer must be < 0.6 [email protected]>0.125μm/cm2 and < 0.15 [email protected]>0.25μm/cm2 for 250nm process and 130nm Design Rule Usage, 300mm wafers must have ≤60 [email protected]>=90nm for 130nm process.

Siliziumwafer für Photolithographie oder Strukturierungstest

Test Silicon Wafers for Photolithography or Patterning Test mainly focus on requirement in wafer thickness variation, TTV, WARP, BOW and flatness. For instant, a 250nm wafer die Design, its corresponding SEMI Standard M24: Flatness per Site (SFSR) of ≤ 0.2μm at site size 25 x 25mm.

Furnace Grade Test Silicon Wafers

Furnace Grade Test Wafer Semiconductor has strictly requirement for electrical characteristics but not tight particle performance.

Resistivity of Furnace grade test silicon wafer should be above 1ohm.cm and doped very evenly with lifetime>=200us.

Auch Wafer mit Ofenqualität sind streng kontrollierter Sauerstoff- und Kohlenstoffgehalt sowie radialer Widerstandsgradient.

Virgin Test Wafers

Virgin test silicon wafers are not used in semiconductor manufacturing, but for wafer process monitoring according to SEMI M8-93.

Solar Grade Silicon Wafer

Compared with IC grade silicon wafer, Solar Grade silicon wafer has lower requirement,

seine Reinheit beträgt> = 99,9999%, während die Reinheit in IC-Qualität> = 99999999,99% beträgt

 

4. FAQ: 

Q: What is the Difference between Prime, Test and Dummy Silicon Wafer?

A: Prime-Grade-Siliziumwafer ist der beste Siliziumwafer für die formale Waferherstellung und Fotolithografie.

Test silicon wafer is the silicon wafer for equipment test or fab management and test.

Siliziumwafer in Dummy-Qualität ist der Siliziumwafer für die Bewertung des Produktionsprozesses oder die Sicherheitsmaßnahme in der Produktionslinie.

Compared with Test grade silicon wafer, the parameters of dummy grade silicon wafer is much easier or loose for testing equipment for wafer dimensional and structural characteristics only. But it is not so strict to distinguish sometimes.

 

PAM-XIAMEN bietet Ihnen Technologie- und Wafer-Support.

Für weitere Informationen, besuchen Sie bitte unsere Website: https://www.powerwaywafer.com/silicon-wafer,

Bitte senden Sie uns E-Mail an [email protected] und [email protected]