Gallium Arsenide(GaAs) Wafer with High Mobility

Gallium Arsenide(GaAs) Wafer with High Mobility

PAM-XIAMEN, one of leading gallium arsenide wafer manufacturers, can offer Gallium Arsenide(GaAs) wafer with high mobility. Normally mobility of n type/Si doped GaAs is above 1000cm2/V.s, mobility of p type/Zn doped GaAs is above  50~120cm2/V.s,and mobility of undoped GaAs is require to above 3500cm2/V.s, but we can select material and get high mobility >4500 or >5000cm2/V.s even if necessary.

1. Specification of 4-inch Gallium Arsenide(GaAs) wafer with high mobility:

Method: VGF

Diameter: 100.0±0.2 mm

Type: S-I, c doped

Orientation: (100)±0.3° towards (110)

Resistivity: >0.8*10^8  Ohm*cm

Mobility: 4800cm2/(V*s)

EPD : <= 800 cm-2

Thickness: 600±25 um

BOW: <= 4 um

Warp: <=  5 um

TTV: <= 3 um

TIR: <= 3 um

LFPD: <= 1 um

LTV: <=  1.5um

PLTV: >90% on square 15*15mm

Particles: <100pcs/wafer (for particles size >0.28 um), Haze <5ppm

OF:  EJ[0-1-1] ± 0,5°/ 32.5 ±1.0mm

IF: EJ[0-1-1] ± 0.5°/ 18.0 ±1.0mm

Front Side: polished, epi-ready

Back side: polished

Laser Marking: on back side

2. Comparison between C doped GaAs Wafer and Si Doped GaAs Wafer

Compared with the undoped one, the mobility of the Si doped Gallium Arsenide (GaAs) wafer is lower. More details, please see the table below:

Parameter Customer’s Requirements Guaranteed/Actual Values UOM
Growth Method: VGF VGF
Conduct Type: S-C-N S-C-N
Dopant: GaAs-Si GaAs-Si
Diameter: 76.2±0.1 76.2±0.1 mm
Orientation: <100>±0.5° <100>±0.5°
OF location/length; EJ[0-1-1]±0.5°/22±2 EJ[0-1-1]±0.5°/22±2
IF location/length: EJ[0-1 1]±0.5°/11±2 EJ[0-1 1]±0.5°/11±2
lngot CC: Min: 0.5E18 Max: 2.0E18 Min: 0.6E18 Max:2.0E18
Resistivity: Min: 1E-3 Min: 1.6E-3 Max:4.2E-3 Ohm*cm
Mobility: Min: 1500 Min: 1810 Max: 2407 cm2/v-s
EPD: Max: 10000 Min: 50 Max: 300 /cm2
Thickness: 400±20 400±20 um
TTV: Max:10 Max:10 um
TIR: Max:15 Max:15 um
Bow: Max:15 Max:15 um
Warp: Max:15 Max:15 um
Edge Rounding: 0.25 0.25 mmR
Laser Marking: N/A N/A
Surface Finish-front: Polished Polished
Surface Finish-back: Etched Etched  


Remark: Mobility refers to the average drift velocity of carrier produced under unit electric field intensity. Mobility represents the carrier conductivity, which is determined by the carrier concentration. The mobility of general semiconductor materials is usually 10^2-10^6 cm2 / V · s. Mobility is an important parameter to characterize semiconductor. The higher the mobility is, the faster the device runs and the higher the cut-off frequency is. The electronic effective mass of Gallium Arsenide (GaAs) is much smaller than that of silicon, so GaAs is used to make high frequency devices.

3. Applications of Gallium Arsenide(GaAs) Wafer with High Mobility

The electron mobility of gallium arsenide material is about 6 times that of silicon, and it has a direct band gap. Therefore, GaAs-based devices have high-frequency and high-speed optoelectronic properties relative to silicon-based devices. As a result, gallium arsenide wafers are widely used in the fields of optoelectronics and microelectronics, and are the key substrate material for making semiconductor light-emitting diodes and communication devices. Gallium arsenide(GaAs) wafer with high mobility makes small and medium power microwave devices lower power loss, so it occupies a dominant position in the fields of mobile phone communications, local area wireless networks, GPS and automotive radars.


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