GaSbのウェハー

PAM-XIAMEN offers Compound Semiconductor GaSb wafer – gallium antimonide which are grown by LEC(Liquid Encapsulated Czochralski) as epi-ready or mechanical grade with n type, p type or semi-insulating in different orientation(111) or (100).

  • 説明

製品の説明

PAM-XIAMEN offers Compound Semiconductor GaSb wafer – ガリウムアンチモン grown by LEC(Liquid Encapsulated Czochralski), which can reduce the defects of gallium antimonide. The GaSb wafer is epi-ready or mechanical grade with n type, p type or semi-insulating in different orientation(111) or (100).

Gallium antimonide (GaSb) is a semiconducting compound of gallium and antimony of the III-V family. It has a lattice constant of about 0.61 nm. GaSb wafers can be used for Infrared detectors,infrared LEDs and lasers and transistors, and thermophotovoltaic systems.

Here is the detail specification of wafer:

2 "(50.8ミリメートル)のGaSbウェーハ仕様

3 "(50.8ミリメートル)のGaSbウェーハの仕様

4」(100ミリメートル)のGaSbウェーハ仕様

 

2″ GaSb Wafer Specification

tem Specifications
ドーパント アンドープ Zinc Tellurium
Conduction Type P型 P型 N型
Wafer Diameter 2″
Wafer Orientation (100)±0.5°
Wafer Thickness 500±25um
Primary Flat Length 16±2mm
Secondary Flat Length 8±1mm
Carrier Concentration (1-2)x1017cm-3 (5-100)x1017cm-3 (1-20)x1017cm-3
Mobility 600-700cm2/V.s 200-500cm2/V.s 2000-3500cm2/V.s
EPD <2×103cm-2
TTV <10um
<10um
WARP <12um
Laser Marking upon request
Suface Finish P/E, P/P
Epi Ready yes
パッケージ Single wafer container or cassette

 

 3″ GaSb Wafer Specification

tem Specifications
Conduction Type P型 P型 N型
ドーパント アンドープ Zinc Tellurium
Wafer Diameter 3″
Wafer Orientation (100)±0.5°
Wafer Thickness 600±25um
Primary Flat Length 22±2mm
Secondary Flat Length 11±1mm
Carrier Concentration (1-2)x1017cm-3 (5-100)x1017cm-3 (1-20)x1017cm-3
Mobility 600-700cm2/V.s 200-500cm2/V.s 2000-3500cm2/V.s
EPD <2×103cm-2
TTV <12um
<12um
WARP <15um
Laser marking upon request
Suface finish P/E, P/P
Epi ready yes
パッケージ Single wafer container or cassette

 

4″ GaSb Wafer Specification

tem Specifications
ドーパント アンドープ Zinc Tellurium
Conduction Type P型 P型 N型
Wafer Diameter 4 "
Wafer Orientation (100)±0.5°
Wafer Thickness 800±25um
Primary Flat Length 32.5±2.5mm
Secondary Flat Length 18±1mm
Carrier Concentration (1-2)x1017cm-3 (5-100)x1017cm-3 (1-20)x1017cm-3
Mobility 600-700cm2/V.s 200-500cm2/V.s 2000-3500cm2/V.s
EPD <2×103cm-2
TTV <15um
<15um
WARP <20um
Laser marking upon request
Suface finish P/E, P/P
Epi ready yes
パッケージ Single wafer container or cassette

 

1)2 "(50.8ミリメートル)、3"(76.2ミリメートル)のGaSbウェハ

Orientation:(100)±0.5°
Thickness(μm):500±25;600±25
Type/Dopant:P/undoped;P/Si;P/Zn
Nc(cm-3):(1~2)E17
Mobility(cm2/V ·s):600~700
Growth Method:CZ
Polish:SSP

2)2」(50.8ミリメートル)のGaSbウェハ
Orientation:(100)±0.5°
Thickness(μm):500±25;600±25
Type/Dopant:N/undoped;P/Te
Nc(cm-3):(1~5)E17
Mobility(cm2/V ·s):2500~3500
Growth Method:LEC
Polish:SSP

3)2」(50.8ミリメートル)のGaSbウェハ
Orientation:(111)A±0.5°
Thickness(μm):500±25
Type/Dopant:N/Te;P/Zn
Nc(cm-3):(1~5)E17
Mobility(cm2/V ·s):2500~3500;200~500
Growth Method:LEC
Polish:SSP

4)2」(50.8ミリメートル)のGaSbウェハ
Orientation:(111)B±0.5°
Thickness(μm):500±25;450±25
Type/Dopant:N/Te;P/Zn
Nc(cm-3):(1~5)E17
Mobility(cm2/V ·s):2500~3500;200~500
Growth Method:LEC
Polish:SSP

5)2」(50.8ミリメートル)のGaSbウェハ
Orientation:(111)B 2deg.off
Thickness(μm):500±25
Type/Dopant:N/Te;P/Zn
Nc(cm-3):(1~5)E17
Mobility(cm2/V ·s):2500~3500;200~500
Growth Method:LEC
Polish:SSP

相対製品:
InAsのウェハ
InSbのウェハ
InP基板
GaAs基板
GaSbのウェハ
GaPのウェーハ

ガリウムアンチモン(GaSbでは)のような切断、エッチング又は研磨仕上げを有するウェーハとして供給され、キャリア濃度、直径と厚さの広い範囲で利用可能であることができます。

GaSb material presents interesting gallium antimonide properties for single junction thermophotovoltaic (TPV) devices. GaSb: Te single crystal grown with Czochralski (Cz) or modified Czo- chralski (Mo-Cz) methods are presented and the problem of Te homogeneity discussed. As the carrier mobility is one of the key points for the gallium antimonide crystals, Hall measurements are carried out. We present here some complementary developments based on the material processing point of view: the bulk gallium antimonide crystal growth, the gallium antimonide wafer preparation, and the gallium antimonide wafer etching. Subsequent steps after these are related to the p / no r n/p junction elaboration. Some results obtained for different thin-layer elaboration approaches are presented. So from the simple vapor phase diffusion process or the liquid phase epitaxy process up to the metal organic chemical vapor deposition process, we report some material specificity.

We also offer gallium antimonide wafer epi service, take below as an example:

2”size GaSb epi wafer:
Epi layer: Thikness 0.5 um, undoped/p type GaSb epi layer (undoped InP epi layer also available),
Substrate:2” semi-insulating GaAs

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