ScxAl1-xN 박막의 특성에 대한 열간 어닐링의 영향에 관한 연구
AlN thin film, as a piezoelectric material with a wurtzite structure, has attracted much attention due to its excellent performance. However, compared with other piezoelectric materials such as Pb (ZrxTi1-x) O3 (lead zirconate titanate, PZT), pure AlN thin films exhibit poorer piezoelectric response. Doping another element in AlN is [...]