Lattice bending in LEC-grown semi-insulating GaAs crystal wafers was investigated by X-ray diffraction. Various distributions in the lattice bending were observed in wafers from different boules. Prominent bends, with radii of curvature of about 20 m, were observed at places where the relevant topographs showed the presence of fine cellular dislocation networks. The apparent wafer bending was also examined optically and was found to be caused mainly by back surface damage.
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