M Plane Si-GaN Freestanding GaN Substrate

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M Plane Si-GaN Freestanding GaN Substrate

PAM-XIAMEN offers M Plane Si-GaN Freestanding GaN Substrate

Item PAM-FS-GAN M-SI
Dimension 5 x 10 mm2 or 5 x 20 mm2
Thickness 380+/-50um
Orientation M plane (1-100) off angle toward A-axis 0 ±0.5°

M plane (1-100) off angle toward C-axis -1 ±0.2°
Conduction Type Semi-Insulating
Resistivity (300K) >106 Ω·cm
TTV ≤ 10 µm
BOW BOW ≤ 10 µm
Surface Roughness Front side: Ra<0.2nm, epi-ready;

Back side: Fine Ground or polished.
Dislocation Density ≤  5 x 10 6cm-2
Macro Defect Density 0 cm-2
Useable Area > 90% (edge exclusion)
Package each in single wafer container, under nitrogen atmosphere, packed in class 100 clean room

 

For more information, please contact us email at victorchan@powerwaywafer.com and powerwaymaterial@gmail.com

2020-08-20

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