Wafer Substrat Sapphire Bermotif PSS

Wafer Substrat Sapphire Bermotif PSS

PAM-XIAMEN offers PSS patterned sapphire substrate for high brightness GaN based LED EPI growing application. The patterned sapphire substrate wafer adalah menanam topeng etsa kering pada substrat nilam. Topeng terukir dengan proses fotolitografi standard. Kemudian, safir itu diukir oleh teknologi pengukiran ICP, dan sementara itu, topeng dikeluarkan. Selepas itu, bahan GaN ditanam di safir, sehingga epitaxy menegak dari bahan GaN menjadi epitaxy mendatar. Perincian substrat nilam berpola ada di bawah:

Substrat Sapphire Berkola

Substrat Sapphire PSS

1.Spengkhususandari Substrat Sapphire Berkola

Parameter Spesifikasi Unit
Bahan Monokristalin dengan ketulenan tinggiAl2O3
diameter 50.8 ± 0.1
ketebalan 430 ± 10
Variasi ketebalan total ≤10
Panjang rata primer 16.0 ± 1.0
Orientasi rata primer Satah ± 0.2
Kualiti permukaan depan Epitaxial siap
Kekasaran permukaan belakang 1.0 ± 0.1
Orientasi permukaan A 0˚off ± 0.1
Orientasi permukaan M 0.2˚off ± 0.10
Orientasi permukaan R R9
BOW -10 ~ 0
WARP ≤15
Lebar Corak 2.7 ± 0.15
Ketinggian Corak 1.7 ± 0.15
Pola Corak 3.0 ± 0.05

2.Mengapa Memilih Substrat Sapphire Berpola untuk LED?

On the one hand, the cone-shaped patterned sapphire substrate wafer can effectively reduce the dislocation density of the GaN epitaxial material(the patterned sapphire substrate dislocation is low), thereby reducing the non-radiative recombination of the active area, reducing the reverse leakage current, and improving the life of the LED. On the other hand, the light emitted from the active region is scattered multiple times by the interface of GaN and sapphire substrate, and the exit angle of total reflection light is changed, increasing the probability that the light of the flip-chip LED emerges from the sapphire substrate, thereby improving the extraction efficiency of the light.

Ringkasnya, kecerahan cahaya yang dipancarkan LED yang ditanam pada substrat nilam bercorak nano bertambah baik daripada LED tradisional. Arus kebocoran terbalik dikurangkan, memanjangkan jangka hayat LED.

A patterned sapphire substrate belongs to the semiconductor industry. As a high-brightness epitaxial material, it is the source material of the LED lighting industry. Meanwhile, using PSS Al2O3 wafer to grow epitaxial wafers is the most effective way to improve the brightness of the chip. It is also the best choice for the high-power and high-brightness epitaxial wafers.

Untuk maklumat lebih lanjut, sila hubungi kami melalui e-mel di victorchan@powerwaywafer.com dan powerwaymaterial@gmail.com.

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