Tag - soi waf

1 – Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology

1 – Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology This chapter reviews various processes for manufacturing SOI wafers. There is a specific focus on Separation by IMplantation of OXygen (SIMOX) and on technologies based on direct bonding (bonded silicon-on-insulator (BSOI), epitaxial layer transfer process (Eltran®), Smart Cut™). For the latter, [...]