Unusual defects, generated by wafer sawing: Diagnosis, mechanisms and how to distinguish from related failures
Unusual defects, generated by wafer sawing: Diagnosis, mechanisms and how to distinguish from related failures In the wafer sawing process, unusual failures were observed and their root causes have been investigated. Besides classical and well-known failures, the following failure mechanisms were found. Surface-ESD (ESDFOS), caused by charged water drops and [...]