Photomask Middium and Small Size

Photomask Middium and Small Size

PAM XIAMEN offers Middium and Small Size Photomask.

Chromium Plate Accuracy (Standard Size:6inch Quartz)

Accuracy/Grade Max Accuracy High-precision Medium accuracy General accuracy
Min.Line/Space Width 0.75μm/0.75μm 3μm/3μm 5μm/5μm 10μm/10μm
CD Control ±0.1μm ±0.3μm ±0.5μm ±1.0μm
Total Pitch Accuracy ±0.25μm ±0.5μm ±0.75μm ±1.0μm
Registration Accuracy ±0.25μm ±0.5μm ±0.75μm ±1.0μm
Overlay Accuracy ±0.25μm ±0.5μm ±0.75μm ±1.0μm
Orthogonality ±0.5μrad ±0.75μrad ±1.0μrad ±2.0μrad


Chrome Plate Material  (Photomask Blank Plate)

Material Soda Lime Glass、Quartz
Max. Size 3006,4009,5009,6012,6025,7012,9012,12″x12″,14″x14″
Normal Size 1.5±0.2mm,2.3±0.2mm ,3.0±0.2mm ,4.8±0.2mm
Thickness 6.35±0.2mm (QZ)
Film Type Low Reflectance Chrome
Optical Density(λ=450nm) Between Plates3.0±0.3 In Plate±0.3
Reflectivity(λ=436nm) Between Plates10±5% In Plate±2%


Main application areas:
1. IC Bumping, IC board, IC Lead Frame and other related industries;
2. LED (PSS), MEMS, SENSOR and ENCODER and other fine electronic components industry.


For more information, please visit our website:,
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Found in 1990, Xiamen Powerway Advanced Material Co., Ltd (PAM-XIAMEN) is a leading manufacturer of semiconductor material in China. PAM-XIAMEN develops advanced crystal growth and epitaxy technologies, manufacturing processes, engineered substrates and semiconductor devices. PAM-XIAMEN’s technologies enable higher performance and lower cost manufacturing of semiconductor wafer.

Quality is our first priority. PAM-XIAMEN has been ISO9001:2008, owns and shares four modern facories which can provide quite a big range of qualified products to meet different needs of our customers, and every order has to be handled through our rigorous quality system.Test report is provided for each shipment, and each wafer are warranty.

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