R-Plane Sapphire Substrate with SSP

R-Plane Sapphire Substrate with SSP

PAM-XIAMEN offers R-Plane（1-102） Sapphire Substrate, single side polished,please see below spec:

2”,R-Plane Sapphire Substrate with SSP

No	Item	Specification
1	Material	High Purity Al2O3
2	Diameter	50.8土0.1mm
3	Orientation	R-plane<1-102>土0.2°
4	Thickness	430土15um
5	TTV	≤15um
6	Bow	≤10um
7	Warp	≤15um
8	Primary Flat Length	16.0土1.0mm
9	Front suface Roughmess(Ra)	Ra≤0.3nm
10	Bock Surtace Roughness(Ra)	0.8~1.2um
11	Primary Flat Orienation	A-plane+0.2°
12	Surtace onentation	R-Plane土0.2°
13	Laser Mark	back side or front side or no laser mark
14	Package	25pcsCassede.Vacum-sealed,Nitrogen-flled,Class-100 Cleanroom

3”,R-Plane Sapphire Substrate with SSP

No	ltem	Specification
1	Material	High Purity Al2O3
2	Diameter	76.2土0.2mm
3	Thickness	350土25um
4	Orientation	R-plane<1-102>土0.2°
5	Primary Flat Orientation	45+2CCCW on R
6	Primary Flat Lengin	22.0土1.0mm
7	TTV	≤25um
8	Bow	-25~0μm
9	Warp	≤30um
10	TIR	≤15um
11	Front Surtace Roughness(Ra)	Miror polished,EPl-Ready,Ra≤0.3nm
12	Back Surface Roughness(Ra)	0.8~12um
13	Laser Mark	Back or Front Side(Backside Preterred)
14	Package	25pcs/Cassette,Vacum-sealed.Nitrogen- Tilled,Class-100 Cleanroom

Remark: we also can offer 4”size R-plane Sapphire substrate. Cleanliness can not meet the requirement for microelectronics semiconductor.

For more information, please contact us email at [email protected] and [email protected]

2020-05-21

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