R-Plane Sapphire Substrate with SSP

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R-Plane Sapphire Substrate with SSP

PAM-XIAMEN offers R-Plane（1-102） Sapphire Substrate, single side polished,please see below spec:

2”,R-Plane Sapphire Substrate with SSP

No Item Specification
1 Material High Purity Al2O3
2 Diameter 50.8土0.1mm
3 Orientation R-plane<1-102>土0.2°
4 Thickness 430土15um
5 TTV ≤15um
6 Bow ≤10um
7 Warp ≤15um
8 Primary Flat Length 16.0土1.0mm
9 Front suface Roughmess(Ra) Ra≤0.3nm
10 Bock Surtace Roughness(Ra) 0.8~1.2um
11 Primary Flat Orienation A-plane+0.2°
12 Surtace onentation R-Plane土0.2°
13 Laser Mark back side or front side or no laser mark
14 Package 25pcsCassede.Vacum-sealed,Nitrogen-flled,Class-100 Cleanroom

3”,R-Plane Sapphire Substrate with SSP

No ltem Specification
1 Material High Purity Al2O3
2 Diameter 76.2土0.2mm
3 Thickness 350土25um
4 Orientation R-plane<1-102>土0.2°
5 Primary Flat Orientation 45+2CCCW on R
6 Primary Flat Lengin 22.0土1.0mm
7 TTV ≤25um
8 Bow -25~0μm
9 Warp ≤30um
10 TIR ≤15um
11 Front Surtace Roughness(Ra) Miror polished,EPl-Ready,Ra≤0.3nm
12 Back Surface Roughness(Ra) 0.8~12um
13 Laser Mark Back or Front Side(Backside Preterred)
14 Package 25pcs/Cassette,Vacum-sealed.Nitrogen-
Tilled,Class-100 Cleanroom

Remark: we also can offer 4”size R-plane Sapphire substrate. Cleanliness can not meet the requirement for microelectronics semiconductor.


For more information, please contact us email at victorchan@powerwaywafer.com and powerwaymaterial@gmail.com.

2020-05-21

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