Semi-insulating GaAs Substrate PAM190628-GAAS
PAM-XIAMEN offers 4inch Semi-insulating GaAs Substrate with good flatness such as TTV<=3UM, BOW<=4um, and WARP<5um, TIR(Total Indicated Runout)<=3um, LFPD(Local Focal Plane Deviation)<=1um, LTV(Local Thickness Variation)<=1.5um.
Specification of Semi-insulating GaAs Substrate
Parameter | Customer’sRequirements | Guaranteed/Actual Values | UOM | |
GrowthMethod: | VGF | VGF | — | |
ConductType:. | S-I-N | S-I-N | — | |
Dopant: | Undoped | Undoped | ||
Diameter: | 100.0±0.2 | 100.0±0.2 | mm | |
Orientation: | (100)±0.30offtoward (110) | (100)±0.30offtoward (110) | — | |
OFlocation/length: | EJ|0-1-1|±0.50/32.5±1.0 | EJ[0-1-1]±0.50/32.5±1.0 | — | |
IFlocation/length: | EJ|0-11|±0.50/18.0±1.0 | EJ[0-11|±0.50/18.0±1.0 | — | |
Resistivity: | Min:0.6E8 | Min:0.8E8 | Max:2.4E8 | ohm.cm |
Mobility: | Min:4500 | Min:4769 | Max:6571 | cm2/v.s |
EPD: | Max:10000 | Min:700 | Max:700 | /cm2 |
Thickness: | 600±25 | 600±25 | pm | |
Bow: | Max:4 | Max:4 | μm | |
Warp: | Max:5 | Max:5 | μm | |
TTV: | Max:3 | Max:3 | μm | |
TIR:. | Max:3 | Max:3 | pm | |
LFPD: | Max:1 | Max:1 | pm | |
LTV: | Max:1.5 | Max:1.5 | μm | |
PLTV: | >90@15mm*15mm | >90@15mm*15mm | % | |
ParticalCount: | <100/wafer(for particle>0.28um); Haze<5ppm |
<I00/wafer(for particle>0.28um); Haze<5ppm |
— | |
EdgeRounding: | 0.375 | 0.375 | mmR | |
Laser Marking: | Backside | Backside | — | |
SurfaceFinish- front: |
Polished | Polished | — | |
SurfaceFinish -back: |
Polished | Polished | — |
What is the typical Carrier Concentration for Semi-insulating GaAs Substrate?
The carrier concentration for Semi-insulating GaAs wafer is E6-E7/cm3, typical value 6.71E6/cm3~1.12E7/cm3, please see below detail parmeters:
Item No. | 4# | 91# | ||||
Spec. | 电阻率 | 迁移率 | C.C | 电阻率 | 迁移率 | C.C |
1 | 1.32E+08 | 5457 | 8.68E+06 | 1.70E+08 | 5482 | 6.71E+06 |
2 | 1.05E+08 | 5738 | 1.04E+07 | 1.63E+08 | 5193 | 7.38E+06 |
3 | 9.86E+07 | 5644 | 1.12E+07 | 1.58E+08 | 5392 | 7.34E+06 |
PL Mapping of Semi-insulating GaAs Substrate

Semi-insulating GaAs Substrate

Semi-insulating GaAs Substrate
For more information, please contact us email at victorchan@powerwaywafer.com and powerwaymaterial@gmail.com