Optimisation of the epi-ready semi-insulating GaAs wafer preparation procedure

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The surface quality is crucial for growth of epitaxial layers on III–V semiconductor substrates. In this work the procedures of epi-ready semi-insulating (SI) GaAs wafer preparation were developed. The atomic force microscopy (AFM), triple crystal X-ray diffraction (TCD) and X-ray photoelectron spectroscopy (XPS) were used to monitor morphology and composition of substrates with different chemical treatment history. We propose an optimised epi-ready SI GaAs wafer preparation procedure involving NH4OH:H2O2:H2O/NaOCl:H2O2:H2O etching/polishing.

Source:Institute of Electronic Materials Technology

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2013-08-28

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