Tag - 3c sic

Toward high-quality 3C–SiC membrane on a 3C–SiC pseudo-substrate

Highlights •Elaboration of a smooth 3C–SiC membrane on a SiC substrate. •Faceted surface for the (110) orientation but smoother for the (111) orientation. •Roughness of the 3C–SiC membrane limited to 9 nm for the (111) orientation. •New MEMS devices feasible. •The huge SiC properties could be entirely exploited. The cubic polytype of silicon carbide is [...]