Tag - aln layer

In-plane structural anisotropy and polarized Raman-active mode studies of nonpolar AlN grown on 6H-SiC by low-pressure hydride vapor phase epitaxy

Nonpolar a-plane and m-plane AlN layers were grown on a-plane and m-plane 6H-SiC substrates by low-pressure hydride vapor phase epitaxy (LP-HVPE), respectively. The effects of growth temperature were investigated. Results showed that surface roughness was reduced by increasing the temperature for both a-plane and m-plane AlN layers. In-plane morphological [...]