Fabrication of GaN wafers for electronic and optoelectronic devices
Fabrication of GaN wafers for electronic and optoelectronic devices The fabrication of GaN wafers from GaN boules (ingots) is described. Gallium nitride boules were grown by hydride vapor phase epitaxy and sliced and sized into wafer blanks. The GaN wafer blanks were lapped and polished. The gallium-side of the wafer was...