Tag - GaN layer

Growth of GaN layer with preserved nano-columnar low temperature GaN buffer to reduce the wafer bowing

In this study, a nano-columnar low-temperature (LT) GaN buffer was used to reduce the wafer bowing of a GaN layer grown on a sapphire substrate. A significant reduction in the extent of wafer bowing was observed for the GaN layer for the preserved nano-columnar LT GaN layer when compared with the [...]