Tag - monitor wafer

Growth and analysis of modulation-doped AlGaN/GaN heterostructure on semi-insulating SiC substrate

Growth and analysis of modulation-doped AlGaN/GaN heterostructure on semi-insulating SiC substrateHighlights•The growth of modulation-doped AlGaN/GaN heterostructure on semi-insulating SiC substrate.•The investigation of the effect of HT-AlN thickness on crystalline quality and stress of GaN on SiC.•The semi-insulating characteristic of GaN layer analyzed by PL measurement.•The introduction of modulation-doped AlGaN [...]