Growth and analysis of modulation-doped AlGaN/GaN heterostructure on semi-insulating SiC substrate
Growth and analysis of modulation-doped AlGaN/GaN heterostructure on semi-insulating SiC substrate Highlights • The growth of modulation-doped AlGaN/GaN heterostructure on semi-insulating SiC substrate. • The investigation of the effect of HT-AlN thickness on crystalline quality and stress of GaN on SiC. • The semi-insulating characteristic of GaN layer analyzed by PL...