Tag - sic wafer supplie

Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser

Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser We developed a method to measure the thickness profile and refractive index variation for silicon wafers based on a spectral-domain interferometry. Through a spectral domain analysis of multiple interferograms [...]