Tag - Silica

Performance of colloidal silica and ceria based slurries on CMP of Si-face 6H-SiC substrates

Highlights •The performance of colloidal silica and ceria based slurries on CMP of 6H-SiC substrates were evaluated. •There was a significant difference in the CMP performance of 6H-SiC between silica and ceria based slurries. •For the ceria based slurries, a higher MRR was obtained, especially in strong acid KMnO4 environment. •The maximum MRR [...]