Tag - Substrates

Evaluation of the quality of commercial silicon carbide wafers by an optical non-destructive inspection technique

Evaluation of the quality of commercial silicon carbide wafers by an optical non-destructive inspection techniqueThere is a great need for an in-line, high-speed and non-destructive inspection system capable of evaluating and analyzing the quality SiC wafers for SiC power devices. We have examined whether the laser-based optical non-destructive inspection [...]