Systematic studies of Si and Ge hemispherical concave wafers prepared by plastic deformation
Systematic studies of Si and Ge hemispherical concave wafers prepared by plastic deformation Si and Ge hemispherical concave wafers can be prepared by plastic deformation using Si and Ge single- and polycrystal wafers. Deformation regions in which such Si and Ge hemispherical wafers can be obtained by high-temperature plastic deformation [...]