Testing project: micropipe density
Micropipe are crystalline defects in a single crystal substrate. Today, it is widely used in SiC substrates used in a variety of industries, such as power semiconductor devices for vehicles and high frequency communications devices.
However, during the production of these materials, the crystals undergo internal and external stress, leading to the growth of defects or dislocation in the atomic lattice.
Test equipment: Polarizing microscope
Test result: 0.1-100 pcs/cm2