InSb wafer
PAM-XIAMEN cung cấp tấm wafer InSb bán dẫn hỗn hợp - tấm wafer antimonide indium được phát triển bởi LEC (Czochralski đóng gói dạng lỏng) dưới dạng cấp epi hoặc cơ học với loại n, loại p hoặc bán cách điện theo các hướng khác nhau (111) hoặc (100). Indium antimonide pha tạp isoelectronic (chẳng hạn như pha tạp N) có thể làm giảm mật độ khuyết tật trong quá trình sản xuất màng mỏng indium antimonide.
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Mô Tả Sản Phẩm
PAM-XIAMEN offers Compound Semiconductor InSb wafer – indi antimonide wafer which is grown by LEC(Liquid Encapsulated Czochralski) as epi-ready or mechanical grade with n type, p type or semi-insulating in different orientation(111) or (100). Indium antimonide doped with isoelectronic(such as N doping) can reduce the defect density during the indium antimonide thin films manufacturing process.
Indium antimonide (InSb) is a crystalline compound made from the elements indium (In) and antimony (Sb). It is a narrow-gap semiconductor material from the III-V group used in infrared detectors, including thermal imaging cameras, FLIR systems, infrared homing missile guidance systems, and in infrared astronomy. The indium antimonide detectors are sensitive between 1–5 µm wavelengths. Indium antimonide was a very common detector in the old, single-detector mechanically scanned thermal imaging systems. Another application is as a terahertz radiation source as it is a strong photo-Dember emitter.
wafer Thông số kỹ thuật | |
Mục | Đặc tính kỹ thuật |
wafer Đường kính | 2 "50,5 ± 0.5mm |
3″76.2±0.4mm | |
4″1000.0±0.5mm | |
Định hướng tinh | 2 "(111) AorB ± 0.1 ° |
3″(111)AorB±0.1° | |
4″(111)AorB±0.1° | |
Độ dày | 2 "625 ± 25um |
3″ 800or900±25um | |
4″1000±25um | |
chiều dài phẳng chính | 2 "16 ± 2mm |
3″22±2mm | |
4″32.5±2.5mm | |
chiều dài phẳng THCS | 2 "8 ± 1mm |
3″11±1mm | |
4″18±1mm | |
Kết thúc bề mặt | P / E, P / P |
gói | Epi-Ready, Độc wafer container hoặc CF băng cassette |
Đặc điểm kỹ thuật điện và Doping | |||||
Loại dẫn | n-type | n-type | n-type | n-type | p-type |
dopant | low doped | tên chất hóa học | tellurium thấp | tellurium cao | Genmanium |
EPD cm-2 | 2″3″4″≤50 | 2″≤100 | |||
Mobility cm² V-1s-1 | ≥4*105 | ≥2.5*104 | ≥2.5*105 | không rõ | 8000-4000 |
Carrier Concentration cm-3 | 5*1013-3*1014 | (1-7)*1017 | 4*1014-2*1015 | ≥1*1018 | 5*1014-3*1015 |
1)2″(50.8mm)InSb Wafer
Orientation:(100)
Type/Dopant:N/low doped
Diameter:50.8mm
Thickness:300±25µm;500um
Nc:<2E14a/cm3
Polish:SSP
2)2″(50.8mm)InSb Wafer
Orientation:(100)
Type/Dopant:N/Te
Diameter:50.8mm
Carrier Concentration: 0.8 – 2.1 x 1015 cm-3
Thickness:450+/- 25 um;525±25µm
EPD < 200 cm-2
Polish:SSP
3)2″(50.8mm)InSb Substrate
Orientation:(111) + 0.5°
Thickness:450+/- 50 um
Type/Dopant:N/low doped
Carrier Concentration: < 5 x 10^14 cm-3
EPD < 5 x 103 cm-2
Surface roughness: < 15 A
Bow/Warp: < 30 um
Polish:SSP
4)2″(50.8mm)InSb Substrate
Orientation:(111) + 0.5°
Type/Dopant:P/Ge
Polish:SSP
5)2″(50.8mm)Indium Antimonide Wafer
Thickness:525±25µm,
Orientation:[111A]±0.5°
Type/Dopant:N/Te
Ro=(0.020-0.028)Ohmcm,
Nc=(4-8)E14cm-3/cc,
u=(4.05E5-4.33E5)cm²/Vs,
EPD<100/cm²,
Mobility:>1E4cm2/Vs
One side edge;
In(A) Face: Chemically-mechanically final polished to 0.1µm (Final Polish),
Sb(B) Face: Chemically-mechanically final polished to <5µm (Lasermark),
NOTE: Nc and Mobility are at 77ºK.
Polish:SSP;DSP
6) 2 "(50.8mm) GaSb
Thickness:525±25µm,
Orientation:[111B]±0.5°,
Type/Dopant:P/low doped;N/low doped
Polish:SSP;DSP
Điều kiện bề mặt và Thông số kỹ thuật khác
Indium Antimonide wafer can be offered as wafers with as-cut, etched or polished finishes with wide range of doping concentration and thickness. The InSb wafer could be high quality epi-ready finishing.
Đặc điểm kỹ thuật định hướng
Indium antimonide surface orientations are supplied to an accuracy of +/- 0.5 degrees using a triple axis X-Ray diffractometer system. Indium antimonide substrates can also be supplied with very precise misorientations in any direction from the growth plane. The available InSb wafer orientation could be (100),(111), (110) or other orientation or mis degree.
tình trạng bao bì
Polished wafer: individually sealed in two outer bags in inert atmosphere. Cassette shipments are available if required.
As-cut Wafer: Cassette shipment. (Glassine bag available on request).
Indium Antimonide Properties and Uses
The indium antimonide crystal structure is silver, brittle, and zinc blende structure. The indium antimonide lattice constant is 6.48 Å, and indium antimonide is a direct bandgap material with a narrow band gap of 0.18 eV. The indium antimonide conduction electron mobility is as high as 7800 cm2/V·s , which can be used to make infrared detectors, photomagnetic detectors and Hall devices.
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