2-4.웨이퍼 표면 방향성

2-4.웨이퍼 표면 방향성

2-4.웨이퍼 표면 방향성

격자 구조 내의 결정학적 평면에 대한 웨이퍼 표면의 방향을 나타냅니다.

의도적으로 "오프 방향"으로 절단된 웨이퍼에서 절단 방향은 2차  at에서 멀어지고 1차  at과 평행합니다.

웨이퍼 중앙에 있는 잉곳당 하나의 웨이퍼 샘플에 대해 X선 각도계로 측정됩니다.

 

2018-06-28

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