Research on 4H-SiC Based MEMS Pressure Sensors in Extreme Environments
In the fields of aerospace engines, geothermal development, and automotive electronics, there is a widespread demand for pressure measurement under extreme high temperature conditions. For a long time, silicon-based microelectromechanical systems (MEMS) pressure sensors have been widely used, with the advantages of miniaturization and high accuracy. However, the inherent [...]