Tag - semico

Computer modeling of surface interactions and contaminant transport in microstructures during the rinsing of patterned semiconductor wafers

Computer modeling of surface interactions and contaminHighlights•Dynamics of contaminant removal from the surface of micro/nanotrench is simulated.•The trench is rectangular and made of one or two different materials.•Various diffusivities and surface characteristics are considered in the model.•In multimaterial trench, cleaning dynamics strongly depends on stacking order.•Dynamics has two regimes [...]