Tag - gaas epi wafer

A novel growth strategy and characterization of fully relaxed un-tilted FCC GaAs on Si(1 0 0)

Highlights •Novel growth strategy of GaAs on Si(1 0 0) with AlAs/GaAs strain layer superlattice. •Emphasis on understanding the inconclusive crystalline morphology at initial layers. •Observed low TD in HRTEM and low RMS in AFM. •Observed fourth order of superlattice peaks in ω–2θ scan in HRXRD. •SAEDP shows fcc lattice and RSM study proves [...]