4″ Prime EPI Wafer
PAM XIAMEN offers 4″ Prime EPI Wafer. Substrate: 1. Growth Method CZ 2. Diameter100+/-0.5mm 3. Type-Dopant, P- Boron 4. Resistivity 0.002 – 0.003 ohm-cm 5. Resistivity Radial Variation<10 % 6. Crystal Orientation<111> 4+/- 0.5degree 7. Primary Flat: Orientation Semi degree, Length Semi mm 8. Secondary Flat: Orientation Semi degree, [...]