Tag - silicon on insulator technology

Porous silicon optical microcavity biosensor on silicon-on-insulator wafer for sensitive DNA detection

Silicon-on-insulator (SOI) wafer is one of the most appealing platforms for optical integrated circuit with the potential to realize high performance Ultra Large Scale Integration (ULSI) and device miniaturization. In this work, based on simulations to obtain appropriate optical properties of a porous silicon microcavity (PSM), we successfully fabricated [...]