2 INCH ALUMINUM NITRIDE ALN TEMPLATE ON SAPPHIRE 

PAM XIAMEN offers 2 inch Aluminum Nitride (AlN) Template on sapphire.

1.Specification of (Aluminum Nitride) (AlN) Template on sapphire

Spec1:

2 INCH ALUMINUM NITRIDE ALN TEMPLATE ON SAPPHIRE (0001) SEMI-INSULATING TYPE

Conductivity type: Semi-insulating AlN
Substrate: Sapphire
Dimension: Φ50.8 mm ± 0.1 mm
Thickness: 200nm ~ 5 um (4000~5000 nm)
Edge Exclusion Zone: < 2 mm
Usable area: >90%
Orientation: C plane (0001) ± 1°
Total Thickness Variation: <15 μm
Crystallinity: XRD FWHM of (0002) < 350 arcsec, XRD FWHM of (10-12) < 450 arcsec
Surface Roughness Ra <5 nm (10 µm x 10 µm)
Substrate Structure: Sapphire (0001)
Polishing: Single side polished (SSP). Double-side polished (DSP) are available upon request.

Spec2:

Aluminum Nitride Template on sapphire

Aluminum Nitride Template on sapphire

 

 

 

 

 

 

 

 

Template Name Aluminum Nitride Template on Sapphire
Substrate 2” & 4”Sapphire
Substrate thickness 430~450um
AlN Thickness 50~ 400nm+/-10nm
Template Size 2inch,4inch
Surface Roughness Ra < 1 nm
FWHM (002) 0.17°

 

2.XRD spectra of 2-inch Aluminum Nitride films on sapphire

There only c-axis orientation with sharp peak of Aluminum Nitride films on Sapphire.

Raman spectra of 2-inch Aluminum Nitride films on Sapphire.

 

 

 

 

 

 

 

 

 

 

3.Raman spectra of 2-inch Aluminum Nitride films on Sapphire.

Raman spectra of 2-inch Aluminum Nitride films on Sapphire.

 

 

 

 

 

 

 

 

 

 

 

4.SEM micrographs(×50.00KX) of the 2-inch Aluminum Nitride film on sapphire.

 

 

 

 

 

 

 

 

 

5.AFM micrographs of the 2-inch Aluminum Nitride film on sapphire.
 after rough polishing.

 

 

 

 

 

 

 

Image Ra =0.727 nm with the scanning area of 5×5 μm2.

 

 

 

 

 

For more information, please contact us email at victorchan@powerwaywafer.com and powerwaymaterial@gmail.com

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