3-6. Edge Chips
3-6. Edge Chips
Areas where material has been unintentionally removed from the wafer.Do not confuse fractures in epi crown with edge chips.
3-6. Edge Chips
Areas where material has been unintentionally removed from the wafer.Do not confuse fractures in epi crown with edge chips.
2-23.Micropipe density A micropipe, also referred to as “micropore”, “microtube”, “capillary defect “or “pinhole defect”, is a crystallographic defect in a...
3-9. Comet Tails Comet tails have a discrete head and trailing tail. These features are aligned parallel to the major ...
5-6-2 SiC RF Devices The main use of SiC RF devices appears to lie in high-frequency solid-state high-power amplification at frequencies...
2-24.Wafer Orientation Wafers are grown from crystal having a regular crystal structure, with silicon having a diamond cubic structure with a...
3-2. Scratches Grooves or cuts below the surface plane of the wafer having a length-to-width ratio of greater than 5 to...
5-4-4-3 SiC Epilayer Doping In-situ doping during CVD epitaxial growth is primarily accomplished through the introduction of nitrogen (usually) for n-type...