How Epitaxial Pit Defects Affect SiC MOSFET Device Characteristics?
SiC epitaxial wafer is available for fabricating MOSFET devices, wafer specifications can be found in https://www.powerwaywafer.com/sic-mosfet-structure.html 1. Epitaxial Pits Epitaxial pits, as one of the most common surface morphology defects, have a typical surface morphology and structural profile as shown in Fig.1. The position of thread dislocation (TD) corrosion pits observed [...]